Exhaust and Drain Options

Adjustable Down-flow Exhaust and Drain

Standard on all EDC systems Required for SOG (Spin-ON-Glass) and other coating applications where particles and strings are produced

The primary function is to separate vapors which are exhausted upward from liquids which are drained downward

An adjustable control valve is provided to fine tune exhaust flow (a facility blast-gate, not included, is required for coarse exhaust volume control)

Oversized ø2.5" (65 mm) flexible polypropylene exhaust duct allows more than adequate volume conduction

Large ø1" (25 mm) Convoluted Teflon® drain tubing is used for its high chemical resistance and to stabilize effluent flow velocity

Rinse to Resistivity Option — better control saves Time and Money

Stop guessing! Determine in real time when your substrate is fully rinsed.

Constantly measures the drain fluids electrical conductivity to determine when to end the rinse and start drying

Accurately detecting when the chemical has been adequately rinsed from the substrate and process chamber completely removes this variable, especially when different process chemicals concentrations are used.

Sensing a resistivity setpoint can be fully integrated into your processing sequence. Don't worry, there's also an adjustable bypass time in case something unexpected happens while the system is running unattended.

Save processing TIME (the absolute best result in the shortest possible time — no more guessing!)

Saves Rinse MATERIAL COST (solvent / DI water)

Saves WASTE DISPOSAL COST (eliminates unnecessarily wasted resources year after year)

Port Adapter: Exhausted Drain Reservoir

A Simple way to capture waste materials while providing just the right amount of exhaust (Included on most coaters we offer)

Easily removable screw-in reservoir for waste material with constant view of level (a 2nd reservoir is included to exchange when full)

Small volume exhaust provides continuous vapor extraction, which cannot degrade coating uniformity

Port Adapter: Drain Tube Only

A convenient provision to drain waste materials to a larger vessel (usually an exhausted carboy) (Standard alternate option on most coaters we offer)

Allows spin coaters to be connected to a large vessel, like the exhausted carboy (not included) or a facility drain

Not intended for high volume rinsing or drying applications (equipment damage will occur) — use only Adjustable Down-flow Exhaust and Drain, shown above.