Liner
For protection and ease of cleaning
Removable, reusable process chamber liner, made from FEP Teflon®.
- 6 series — P/N 10011274
- 23 series — P/N 11011159
- 8 series — P/N 10011276, P/N 10011385 (4")
- 15 series — P/N 10011278
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