26 April 2024

Programmable Exhaust.

Control exhaust in each step of your process
Create the ideal atmosphere for repeatable thin film uniformity even if your exhaust source is not completely stable
Some processes (particularly thin coatings) are very sensitive to even the smallest gas flow within the process chamber when drying.
You can now automatically control the application of exhaust as part of a process
It is now possible to create a static or reduced flow condition then fully exhaust vapors before opening the process chamber
A retrofit is available for nearly all Laurell spin processors