Laurell Technologies Corporation
22 October 2019
 

Chucks

 

Vacuum Chucks

Low-Profile

These low-profile, O-ring-sealed vacuum chucks are designed to secure substrates very firmly, without deflection, and can operate at very high rotational speed. This simple, balanced, low mass design allows for instantaneous direction change with precise acceleration and deceleration control.

Convenient and affordable fragment adapters are available to accommodate 3 to 50 mm pieces.

See the wafer alignment tool in action below:

Laurell Low-Profile Chuck

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Low-Profile Chucks
Laurell Low-Profile Chuck

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Low-Profile Chuck
Laurell Low-Profile Chuck

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Most Popular Chuck Ø1.75" (~45 mm)
Laurell Fragment Adapter

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Low-Profile Chuck with Fragment Adapters

Fragment Adapters

Always have the right size holder with an O-ring seal to maintain vacuum grip and at the same time cushion your substrate. Slides conveniently over the Ø1.75" (~45 mm) chuck shown above.

Laurell Fragment Adapter

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>3 to 10 mm Adapter
P/N 1002 0481 in NPP
Laurell Fragment Adapter

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>5 to 25 mm Adapter
P/N 1002 0748 in NPP
Laurell Fragment Adapter

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>10 to 50 mm Adapter
P/N 1002 1107 in NPP
Laurell Fragment Adapter

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>18 to 50 mm Adapter
P/N 1002 1108 in NPP
Laurell Fragment Adapters

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Adapters with substrate
Laurell Fragment Adapter and Chuck

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Adapter with Ø1.75" (~45 mm) Vacuum Chuck

Embedded Vacuum

Embedding substrates into the chuck's face is done for two reasons: alignment and uniformity, or possibly both reasons. Thick, round substrates are centered precisely every time, making it virtually impossible to eject during rotation, even if vacuum hold-down fails. A thick, square substrate coating is uniform, even at the edges and corners, being fooled into thinking it is round like the chuck, because it is in such close proximity. Note: minimum thickness is 0.5 mm. Size, tolerance, length, and width must be within ± 0.005" (0.127 mm) — larger will not fit, smaller may not be centered. Several chucks may be required for wide ranges.

 

Laurell Embedded Low-Profile Chuck

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Embedded Low-Profile Chuck
Laurell Embedded Low-Profile Chuck

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Embedded Low-Profile Chuck (Illustration)

High Porosity Vacuum

Flimsy films or foils which cannot support themselves, thermally sensitive optical materials, and thin fragile materials can be securely held with vacuum while being processed. Laurell invented this technology 20 years ago and has many different technologies and porous materials to choose from. No matter what your substrate shape or holding problem is, we likely have an engineered solution, or know where to start to help achieve your goals. Note: minimum practical size is 10 mm to 7" X 7" (180 mm X 180 mm) and the current technology requires a greater vacuum volume than do our other O-ring sealed chucks. This type of chuck is NOT recommended for use with Laurell's IV-PVG, because the design requires high vacuum volume (consult your salesperson before choosing this option).

Laurell High-Porosity Chuck

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High-Porosity Chuck Adapter
Laurell High-Porosity Chuck

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High-Porosity Chuck
Laurell High-Porosity Chuck

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High-Porosity Chuck
Laurell High-Porosity Chuck

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High-Porosity Chuck
Laurell High-Porosity Chuck

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High-Porosity Chuck Adapter

Suction-Cup

  • Conformal, Mark-Free Suction-Cup Chuck
  • Ideal for polycarbonate lenses — will not damage your sensitive material!
  • If scratch-free, two-sided coating is your problem, this chuck is the answer.
  • Available in many sizes — same chuck, many suction cups...
Laurell Suction-Cup Chuck

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Suction-Cup Chuck
Laurell Suction-Cup Chuck Suction-Cup Chuck

Non-Vacuum Chucks

Low-Contact

Closed-Bottom Mechanical Hold

If you can't use vacuum hold-down, we have a wide variety of edge-grip chucks with the absolute minimum back-side contact. Multiple size substrates can be accommodated on the holder shown.

 

Laurell Closed-Bottom Mechanical Chuck

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Closed-Bottom Mechanical Chuck

Open Back-Side Rinse (BSR)

If you do simultaneous front and back-side processing, choose our open-bottom edge-grip chucks. Multiple size substrates can also be accommodated on the holder, but the amount is limited by turbulence caused by too many pins.

Laurell Open Back-Side Rinse Chuck

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Open Back-Side Rinse Chuck
Laurell Open Back-Side Rinse Chuck

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Open Back-Side Rinse Chuck (front)
Laurell Open Back-Side Rinse Chuck

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Open Back-Side Rinse Chuck (back)
Laurell Open Back-Side Rinse Chuck

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Open Back-Side Rinse Chuck
Laurell Open Back-Side Rinse Chuck

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Open Back-Side Rinse Chuck

Special Applications Chucks

We have efficiently engineered and built thousands of successful custom chucks. Please feel free to give us your holding problem.

Laurell CD/DVD Stamper Chuck

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CD/DVD Stamper Chuck with magnetic hold-down
Laurell Retained Mechanical Chuck

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Retained Mechanical Chuck
Laurell CD/DVD Chuck

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CD/DVD Chuck
Laurell CD/DVD Chuck

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CD/DVD Chuck
Laurell Custom Chuck

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Microscope Slide Adapter
P/N 1002 1056 in NPP
P/N 1002 1058 in ECTFE
(special order)
Laurell Mechanical Fragment Adapter

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Mechanical Fragment Chuck

Custom Engineered Chucks

Send us your substrate and we'll try to accommodate your wishes.

Laurell Custom Chuck

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Custom Chuck

Frequently Asked Questions

Q. What makes Laurell chucks so good?

A. Laurell designs and manufactures each chuck specifically for its intended use. Our application-specific chucks are also easy to change and quite affordable. Many convenient slide-on adapters are also available.

Q. How can I make sure my wafer is centered precisely in the center of the chuck?

A. Laurell has several wafer alignment tools for round substrates. Thin square or rectangular plates are aligned in many different ways, your salesperson will explain.

Q. Can I make my own chuck(s)? What about proprietary materials and fixtures?

A. Laurell chucks run best on our systems but if someone has a design they like better we will make every effort to accommodate their wishes. If you allow us to design, manufacture and test the safe operation of your design we would be more than happy to sign an agreement protecting your Intellectual Property.

Q. Can Laurell build chucks for other manufacturers' systems?

A. Our policy is NOT to enhance other manufacturers' equipment. Our competitors have tried to copy our designs, but none have even come close to equalling our performance characteristics. We have been designing and building chucks since 1985 and have made hundreds of incremental enhancements! Yes, you need to buy a Laurell Spin Processor to enjoy all the benefits we have accumulated.