![](http://images.laurell.com/images/laurellLogo-K.png)
Chucks
Vacuum Chucks
Low-Profile
These low-profile, O-ring-sealed vacuum chucks are designed to secure substrates very firmly, without deflection, and can operate at very high rotational speed. This simple, balanced, low mass design allows for instantaneous direction change with precise acceleration and deceleration control.
Convenient and affordable fragment adapters are available to accommodate 3 to 50 mm pieces.
See the wafer alignment tool in action below:
![Laurell Low-Profile Chuck Laurell Low-Profile Chuck](/images/chucks/low-profile-all_s.jpg)
Click to enlarge
Low-Profile Chucks![Laurell Low-Profile Chuck Laurell Low-Profile Chuck](/images/chucks/vacuum-01_s.jpg)
Click to enlarge
Low-Profile Chuck![Laurell Low-Profile Chuck Laurell Low-Profile Chuck](/images/chucks/vacuum-02_s.jpg)
Click to enlarge
Most Popular Chuck Ø1.75" (~45 mm)![Laurell Fragment Adapter Laurell Fragment Adapter](/images/chucks/adapter-low-profile_s.jpg)
Click to enlarge
Low-Profile Chuck with Fragment Adapters![Laurell Fragment Adapter Laurell Fragment Adapter](/images/chucks/adapter-01_s.jpg)
Click to enlarge
>3 to 10 mm AdapterP/N 1002 0481 in NPP
![Laurell Fragment Adapters Laurell Fragment Adapters](/images/chucks/fragment-adapter-side_s.jpg)
Click to enlarge
Adapters with substrate![Laurell Fragment Adapter and Chuck Laurell Fragment Adapter and Chuck](/images/chucks/adapter-chuck_s.jpg)
Click to enlarge
Adapter with Ø1.75" (~45 mm) Vacuum ChuckEmbedded Vacuum
Embedding substrates into the chuck's face is done for two reasons: alignment and uniformity, or possibly both reasons. Thick, round substrates are centered precisely every time, making it virtually impossible to eject during rotation, even if vacuum hold-down fails. A thick, square substrate coating is uniform, even at the edges and corners, being fooled into thinking it is round like the chuck, because it is in such close proximity. Note: minimum thickness is 0.5 mm. Size, tolerance, length, and width must be within ± 0.005" (0.127 mm) larger will not fit, smaller may not be centered. Several chucks may be required for wide ranges.
![Laurell Embedded Low-Profile Chuck Laurell Embedded Low-Profile Chuck](/images/chucks/embedded-low-profile_s.jpg)
Click to enlarge
Embedded Low-Profile Chuck![Laurell Embedded Low-Profile Chuck Laurell Embedded Low-Profile Chuck](/images/chucks/embedded-low-profile-03_s.jpg)
Click to enlarge
Embedded Low-Profile Chuck (Illustration)High Porosity Vacuum
Flimsy films or foils which cannot support themselves, thermally sensitive optical materials, and thin fragile materials can be securely held with vacuum while being processed. Laurell invented this technology 20 years ago and has many different technologies and porous materials to choose from. No matter what your substrate shape or holding problem is, we likely have an engineered solution, or know where to start to help achieve your goals. Note: minimum practical size is 10 mm to 7" X 7" (180 mm X 180 mm) and the current technology requires a greater vacuum volume than do our other O-ring sealed chucks. This type of chuck is NOT recommended for use with Laurell's IV-PVG, because the design requires high vacuum volume (consult your salesperson before choosing this option).
![Laurell High-Porosity Chuck Laurell High-Porosity Chuck](/images/chucks/high_porosity_chuck_s.jpg?1)
Click to enlarge
High-Porosity Chuck Adapter![Laurell High-Porosity Chuck Laurell High-Porosity Chuck](/images/chucks/high_porosity_chuck-2_s.jpg?1)
Click to enlarge
High-Porosity Chuck![Laurell High-Porosity Chuck Laurell High-Porosity Chuck](/images/chucks/high_porosity_chuck-3_s.jpg?1)
Click to enlarge
High-Porosity Chuck![Laurell High-Porosity Chuck Laurell High-Porosity Chuck](/images/chucks/high_porosity_chuck-4_s.jpg?1)
Click to enlarge
High-Porosity Chuck![Laurell High-Porosity Chuck Laurell High-Porosity Chuck](/images/chucks/high_porosity_chuck-5_s.jpg?1)
Click to enlarge
High-Porosity Chuck Adapter![Laurell Suction-Cup Chuck Laurell Suction-Cup Chuck](/images/chucks/suction_s.jpg)
Click to enlarge
Suction-Cup Chuck![Laurell Suction-Cup Chuck Laurell Suction-Cup Chuck](http://images.laurell.com/images/chucks/suction_cup_chuck_feature.gif)
Non-Vacuum Chucks
![Laurell Closed-Bottom Mechanical Chuck Laurell Closed-Bottom Mechanical Chuck](/images/chucks/non-vacuum_s.jpg)
Click to enlarge
Closed-Bottom Mechanical ChuckOpen Back-Side Rinse (BSR)
If you do simultaneous front and back-side processing, choose our open-bottom edge-grip chucks. Multiple size substrates can also be accommodated on the holder, but the amount is limited by turbulence caused by too many pins.
![Laurell Open Back-Side Rinse Chuck Laurell Open Back-Side Rinse Chuck](/images/chucks/bsr-b-02_m.jpg)
Click to enlarge
Open Back-Side Rinse Chuck![Laurell Open Back-Side Rinse Chuck Laurell Open Back-Side Rinse Chuck](/images/chucks/bsr-front_s.jpg)
Click to enlarge
Open Back-Side Rinse Chuck (front)![Laurell Open Back-Side Rinse Chuck Laurell Open Back-Side Rinse Chuck](/images/chucks/bsr-back_s.jpg)
Click to enlarge
Open Back-Side Rinse Chuck (back)![Laurell Open Back-Side Rinse Chuck Laurell Open Back-Side Rinse Chuck](/images/chucks/bsr-02_s.jpg)
Click to enlarge
Open Back-Side Rinse Chuck![Laurell Open Back-Side Rinse Chuck Laurell Open Back-Side Rinse Chuck](/images/chucks/bsr-b-01_s.jpg)
Click to enlarge
Open Back-Side Rinse Chuck![Laurell CD/DVD Stamper Chuck Laurell CD/DVD Stamper Chuck](/images/chucks/CD-DVD-stamper_s.jpg)
Click to enlarge
CD/DVD Stamper Chuck with magnetic hold-down![Laurell Retained Mechanical Chuck Laurell Retained Mechanical Chuck](/images/chucks/custom-retained_s.jpg)
Click to enlarge
Retained Mechanical Chuck![Laurell CD/DVD Chuck Laurell CD/DVD Chuck](/images/chucks/DVD_Disc_Chuck_s.jpg)
Click to enlarge
CD/DVD Chuck![Laurell CD/DVD Chuck Laurell CD/DVD Chuck](/images/chucks/cd-dvd_s.jpg)
Click to enlarge
CD/DVD Chuck![Laurell Custom Chuck Laurell Custom Chuck](/images/chucks/slide_s.jpg)
Click to enlarge
Microscope Slide AdapterP/N 1002 1056 in NPP
P/N 1002 1058 in ECTFE
(special order)
![Laurell Mechanical Fragment Adapter Laurell Mechanical Fragment Adapter](/images/chucks/mechanical-fragment_s.jpg)
Click to enlarge
Mechanical Fragment Chuck![Laurell Custom Chuck Laurell Custom Chuck](/images/chucks/custom-chuck_s.jpg)
Click to enlarge
Custom ChuckFrequently Asked Questions
Q. What makes Laurell chucks so good?
A. Laurell designs and manufactures each chuck specifically for its intended use. Our application-specific chucks are also easy to change and quite affordable. Many convenient slide-on adapters are also available.
Q. How can I make sure my wafer is centered precisely in the center of the chuck?
A. Laurell has several wafer alignment tools for round substrates. Thin square or rectangular plates are aligned in many different ways, your salesperson will explain.
Q. Can I make my own chuck(s)? What about proprietary materials and fixtures?
A. Laurell chucks run best on our systems but if someone has a design they like better we will make every effort to accommodate their wishes. If you allow us to design, manufacture and test the safe operation of your design we would be more than happy to sign an agreement protecting your Intellectual Property.
Q. Can Laurell build chucks for other manufacturers' systems?
A. Our policy is NOT to enhance other manufacturers' equipment. Our competitors have tried to copy our designs, but none have even come close to equalling our performance characteristics. We have been designing and building chucks since 1985 and have made hundreds of incremental enhancements! Yes, you need to buy a Laurell Spin Processor to enjoy all the benefits we have accumulated.
© 2010–2024 Laurell Technologies Corporation