650-Series Controller

Truly Unique Interactive Process Control (NOT a cheap, limited-capability PLC):

• You may now interact freely with the process or allow process inputs to direct actions in a pre-determined way.
• Rotate forward, reverse, or agitate back & forth (cyclically changing direction (programmed in cycles per minute)
• Step backward and forward within a running program
• Loop a sequence of instructions either waiting for an external input or just repeat a step 255 times before continuing.
• Change speed or acceleration rate on the fly — while running in edit mode
• Virtually unlimited number of programs with included PC interface software)
• Actual process, chemical, sensor names are displayed, not cryptic numbers, letters or symbols.
• Clear messages for alarms, failures, and deficiencies indicating what is wrong
• Each program step can be conditionally interlocked with multi-directed action
• Step forward, backwards, pause, stop or start at any point of your process
• Digital inputs (read and direct process based on: end-point detection, resistivity, temperature, pressure, level sensors, exhaust flow, safety interlocks, et al.)
• Digital outputs (control valves, mixers, dampers, alarms including light trees, et al.)
• *Acceleration / Deceleration (programmable in each step with 1 RPM/second increments)
• Speeds as slow as 1 RPM or as high as *12,000 RPM

Standard features include:

• Digital readout of closed loop speed control
• Non-Volatile memory
• Convenient twenty, 51-step program storage (can be rearranged in the field to a maximum of 128 programs with 8 steps each, and a minimum of 5 programs with 255 steps each, if desired)
• Vacuum and lid interlocks — display of actual vacuum at the wafer (will not allow rotation if hold-down force is insufficient) the set point is user adjustable
• Step time from 1 second to 99 minutes 59.9 seconds in 0.1 second increments
• Design precludes accidentally re-running a process on the same wafer
• Password-protected (lock programs, assign different levels access)
• Standard communications port for PC software included — see SPIN3000

Operation:

Familiar keypad —function-oriented interface panel and graphic back-lighted information display make the learning curve just a few minutes to program and use.

Optional Touch Screen Interface is now available.

All Laurell systems are forward and backward compatible — we realize that our customers will challenge us to be ready with new tools to meet their ever-changing requirements... this has always been the motivation behind our designs. You'll notice we don't copy anyone else's ideas — they copy ours (or try to, anyway)...

*may be restricted to lower speed or acceleration rate based upon substrate size, weight or chuck type