WS-650 Spin Coater / Universal Spin Processor

About

This advanced research and development tool is flexible, safe and affordable. The WS-650 Spin Coater series is typically employed for Solvent, Base or Acid-based processing: Coating, Etching, Developing, Rinsing-Drying and Cleaning. Many dispense options both manual and automatic available.

Continue to upgrade your system indefinitely without returning to the factory with our modular "Back-Pack" kits. While all of these process are supported, Laurell recommends single-use only because of known material conflicts, for example, Photoresist and Developer (cross contamination) and SC-1 and SC-2 (HCl + NH₄OH creating NH₄Cl, a hazardous inhalation risk).

Features

• Models available for 150 mm, 200 mm and 300 mm wafers and square substrates
• Digital Process Controller
• Solid Special Formula Natural Polypropylene or Teflon® housing with interlocking clamshell plenum
• Water-clear ECTFE or PVC domed lid
• NPP or Teflon® control valves / drip-free UD-3 injectors (resolution repeatability in µl) — convert your source quickly from a pump to a pressure vessel or a syringe
• Adjustable down-flow exhaust and drain (includes 10' of flexible duct)
• Safety door interlock (disallows rotation and chemical dispense process chamber is open)
• Safety door latch (requires deliberate action to open the process chamber)
• Safety door lock (process chamber can not be opened while a program is running or during chuck rotation after program ends)

Options

• Stainless steel pressure vessels
• ECTFE Halar® encapsulated stainless steel pressure
• Dual containment ECTFE Halar® encapsulated stainless steel pressure vessel (typically for a single or four liter bottle)
• Multiple output injectors
• BP-1 — an inexpensive, disposable dispense pump
• English or Metric size non-vacuum wafer chucks
• Small fragment non-vacuum chuck
• Sealed face Vacuum Chucks
• High Porosity Vacuum chucks for thin films and fragile substrates
• Vacuum adapters for fragments as small as 3 mm
• Many other chucks are available ... samples or specific size, including thickness and ALL tolerances, is required